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1 April 1991 Holographic optical profilometer
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Proceedings Volume 1442, 7th Mtg in Israel on Optical Engineering; (1991) https://doi.org/10.1117/12.49077
Event: 7th Meeting of Optical Engineering in Israel, 1990, Tel-Aviv, Israel
Abstract
We present a novel non-contact holographic optical profilometer, which is light weight, compact and relatively simpler. Computer simulation results reveal that surface measurements with sub-micron resolution are possible both in the horizontal and vertical directions.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erez Hasman, Nir Davidson, and Asher A. Friesem "Holographic optical profilometer", Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); https://doi.org/10.1117/12.49077
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