1 April 1991 Quantum efficiency and crosstalk of an improved backside-illuminated indium antimonide focal plane array
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Proceedings Volume 1442, 7th Mtg in Israel on Optical Engineering; (1991) https://doi.org/10.1117/12.49070
Event: 7th Meeting of Optical Engineering in Israel, 1990, Tel-Aviv, Israel
Abstract
The quantum efficiency and crosstalk of backside illuminated indium antimonide photodiodes in hybrid focal plane arrays are calculated. An improved structure with crosswise ohmic contacts at the backside of the thinned InSb substrate is described. The simulations predict a significant reduction in the crosstalk while retaining high quantum efficiency. High quality InSb PV detector arrays and test devices were fabricated. The process includes lithography on both sides, etch thinning technique and highly controlled passivation on each side for optimum performance. The measurements show good agreement with calculations and indicate that there is no degradation due to fabrication. This study demonstrates the feasability of an improved hybrid staring FPA combining backside illuminated 2D PV detectors in thinned InSb coupled to a silicon processor.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ilam Bloom, Yael Nemirovsky, "Quantum efficiency and crosstalk of an improved backside-illuminated indium antimonide focal plane array", Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); doi: 10.1117/12.49070; https://doi.org/10.1117/12.49070
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