Paper
1 July 1991 Performance tests of large CCDs
Lloyd B. Robinson, William E. Brown, David Kirk Gilmore, Richard J. Stover, Mingzhi Wei, John C. Geary
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Abstract
Results obtained in fabricating and testing of large CCD image sensors are reported. The emphasis is on high quantum efficiency, excellent charge transfer efficiency at low signal level, large pixel count, low readout noise, and very low dark current. The focus is on the use of the devices for optical astronomy where these parameters are most important. Test results for CCDs fabricated by Ford Aerospace and by EG Experiments to demonstrate the feasibility of a reproducible biased-gate using transparent indium tin oxide as a conducting layer over a silicon oxide insulating layer are discussed. Quantum efficiency of bias-gate thinned CCDs is compared with results obtained from a phosphor-coated front- illuminated CCD.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lloyd B. Robinson, William E. Brown, David Kirk Gilmore, Richard J. Stover, Mingzhi Wei, and John C. Geary "Performance tests of large CCDs", Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); https://doi.org/10.1117/12.45326
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KEYWORDS
Charge-coupled devices

Ultraviolet radiation

Quantum efficiency

Semiconducting wafers

Optical sensors

Electrons

Solid state electronics

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