Thinned backside-illuminated cooled CCDs for UV and VUV applications

Ilia Nikolaevic Dalinenko; G. A. Kuz'min; Alexandre Victorovic Malyarov; Alexander M. Prokhorov; Mikhail Ya. Schelev

doi:10.1117/12.44276

1 June 1991 Thinned backside-illuminated cooled CCDs for UV and VUV applications

Ilia Nikolaevic Dalinenko, G. A. Kuz'min, Alexandre Victorovic Malyarov, Alexander M. Prokhorov, Mikhail Ya. Schelev

Proceedings Volume 1449, Electron Image Tubes and Image Intensifiers II; (1991) https://doi.org/10.1117/12.44276
Event: Electronic Imaging '91, 1991, San Jose, CA, United States

Abstract

It is well known that thinned backside-illuminated CCD image sensors are very efficient for electron beam imaging. The authors have adapted an electron-bombarded (EB) CCD for application in UV and VUV spectral regions. This adaptation includes the creation of a shallow accumulation layer near the device backside surface either by ion implantation and annealing or by a certain chemical treatment of the surface. Preliminary experimental results confirm the applicability of the developed procedure in achieving a reasonable quantum efficiency. Some problems associated with the UV and VUV imagers design and fabrication are discussed.

Citation Download Citation

Ilia Nikolaevic Dalinenko, G. A. Kuz'min, Alexandre Victorovic Malyarov, Alexander M. Prokhorov, and Mikhail Ya. Schelev "Thinned backside-illuminated cooled CCDs for UV and VUV applications", Proc. SPIE 1449, Electron Image Tubes and Image Intensifiers II, (1 June 1991); https://doi.org/10.1117/12.44276

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available