1 June 1991 Thinned backside-illuminated cooled CCDs for UV and VUV applications
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Abstract
It is well known that thinned backside-illuminated CCD image sensors are very efficient for electron beam imaging. The authors have adapted an electron-bombarded (EB) CCD for application in UV and VUV spectral regions. This adaptation includes the creation of a shallow accumulation layer near the device backside surface either by ion implantation and annealing or by a certain chemical treatment of the surface. Preliminary experimental results confirm the applicability of the developed procedure in achieving a reasonable quantum efficiency. Some problems associated with the UV and VUV imagers design and fabrication are discussed.
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Ilia Nikolaevic Dalinenko, Ilia Nikolaevic Dalinenko, G. A. Kuz'min, G. A. Kuz'min, Alexandre Victorovic Malyarov, Alexandre Victorovic Malyarov, Alexander M. Prokhorov, Alexander M. Prokhorov, Mikhail Ya. Schelev, Mikhail Ya. Schelev, } "Thinned backside-illuminated cooled CCDs for UV and VUV applications", Proc. SPIE 1449, Electron Image Tubes and Image Intensifiers II, (1 June 1991); doi: 10.1117/12.44276; https://doi.org/10.1117/12.44276
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