1 July 1991 Transparent phase-shifting mask with multistage phase shifter and comb-shaped shifter
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Abstract
This paper introduces the novel concepts of 'multistage phase shifter' and 'comb-shaped shifter' for resolving the problems of a transparent type phase shifting mask. The use of a multistage shifter decreases the light intensity dip at the shifter edges. The use of the comb- shaped shifter enables control of the pattern width. The effectiveness of a multistage shifter and a comb-shaped shifter were demonstrated by experiments and simulations. These technologies make it possible to fabricate a wide range of patterns for VLSI using the transparent phase shifting mask.
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Hisashi Watanabe, Yoshihiro Todokoro, Yoshihiko Hirai, Morio Inoue, "Transparent phase-shifting mask with multistage phase shifter and comb-shaped shifter", Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); doi: 10.1117/12.44832; https://doi.org/10.1117/12.44832
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