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1 July 1991 Cross-sectional imaging in SEM: signal formation mechanism and CD measurements
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Abstract
SEM cross-sectional (CS) imaging widely practiced in CD measurements of sub- micron (down to .10 micrometers ) features will be reviewed with emphasis on the accuracy with which these measurements represent the actual dimensions. Since the CS imaging mode is commonly employed to establish a correct CD linescan measuring algorithm, the magnitude of systematic error associated with CS imaging at specific SEM settings will be addressed. The image formation mechanism developed by K.-R. Peters was invoked in the investigation of the electron-scattering signal generated by topographic contrast in CS imaging. The main result of this study--the systematic error in the CS imaging mode, at the same experimental conditions, is larger than that in the normal incidence linescan mode--has been found to markedly contradict the commonly accepted metro logical assumption applied to CS CD measurements. Theoretical and experimental results supporting this conclusion will be presented and discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leon A. Firstein and Arthur Noz "Cross-sectional imaging in SEM: signal formation mechanism and CD measurements", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44426
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