1 July 1991 High-speed stepper setup using a low-voltage SEM
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Under low dose conditions, low-voltage SEMs can measure the bottom width of a resist profile accurately over a wide range of resist side wall angles, thus allowing a accurate, precise and fast measurement of focus-exposure matrices. It is also shown that the measured data fits a fixed parameter model well. By means of statistically leveraged experimental design techniques, a robust focus-exposure-response surface may be generated with as few as nine measurements. This approach greatly reduces measurement time, resulting in high-speed stepper setup. Results are shown for different experimental designs and different low- and-high voltage SEMs.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jozef P. H. Benschop, Jozef P. H. Benschop, Kevin M. Monahan, Kevin M. Monahan, Tom A. Harris, Tom A. Harris, } "High-speed stepper setup using a low-voltage SEM", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44424; https://doi.org/10.1117/12.44424

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