1 July 1991 Measuring films on and below polycrystalline silicon using reflectometry
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Abstract
Visible and ultraviolet light reflectometry provides a fast, convenient, and nondestructive method of characterizing multilayer film structures that include polycrystalline silicon. Reflectance measurements of silicon wafers containing such films have provided information as to the roughness of the poly surface, the thickness of the films, and the optical properties of the poly.
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Herbert L. Engstrom, Herbert L. Engstrom, Stanley E. Stokowski, Stanley E. Stokowski, } "Measuring films on and below polycrystalline silicon using reflectometry", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44467; https://doi.org/10.1117/12.44467
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