Pattern recognition approach to trench bottom-width measurement

Ching-Hua Chou; John L. Berman; Stanley S. C. Chim; Timothy R. Piwonka-Corle; Guoqing Xiao; Gordon S. Kino

doi:10.1117/12.44431

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1 July 1991 Pattern recognition approach to trench bottom-width measurement

Ching-Hua Chou, John L. Berman, Stanley S. C. Chim, Timothy R. Piwonka-Corle, Guoqing Xiao, Gordon S. Kino

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Proceedings Volume 1464, Integrated Circuit Metrology, Inspection, and Process Control V; (1991) https://doi.org/10.1117/12.44431
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

Two approaches to pattern recognition of the width and slope of trenches in photoresist and silicon are described. One method depends on the comparison of the experimental linescans with theoretical calculations of the linescans obtained with either a real-time confocal scanning optical microscope (RSOM) or the Mirau Correlation Microscope (MCM). Comparison of theory and experiments for trenches in photoresist and silicon are in excellent agreement for all trench widths from 0.5 micrometers to 2 micrometers . A second method depends on the use of correlation techniques using the MCM and has enables us to obtain good linearity in trench width measurements down to a width of 0.35 micrometers in 1 micrometers thick photoresist.

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Ching-Hua Chou, John L. Berman, Stanley S. C. Chim, Timothy R. Piwonka-Corle, Guoqing Xiao, and Gordon S. Kino "Pattern recognition approach to trench bottom-width measurement", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44431

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