1 June 1991 Dissolution of poly(p-hydroxystyrene): molecular weight effects
Author Affiliations +
Abstract
In the present study, dissolution rates of PPHS films were measured in aqueous base solvents and in 4-methyl-2-pentanone (MIBK) using laser interferometry. Molecular weights from 6,000 to 100,000 were employed. The films (0.5 to 2 micrometers thick) were spun on silicon wafers from MIBK solutions and baked 1 hour at 160 degree(s)C. The most striking feature of dissolution behavior is the peculiar way in which rate varies with molecular weight. Below a molecular weight of about 20,000, the rate decreases with molecular weight as one might expect. Above 30,000, the rate in aqueous base is much higher and seems to be almost independent of molecular weight. The behavior in MIBK, while more conventional, shows some of the same features. Another feature found with PPHS that is not usual with other polymers is a decrease in dissolution rate with increased thickness. Conventional wisdom would predict that retained solvents (after baking) in thick films would accelerate dissolution compared to thin films. Moreover, the interferograms for thick films show no pronounced change in dissolution rate as the film dissolves. Baking conditions and the pH of the aqueous base developer also affect the dissolution behavior.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Treva Long, Treva Long, Ferdinand Rodriguez, Ferdinand Rodriguez, } "Dissolution of poly(p-hydroxystyrene): molecular weight effects", Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); doi: 10.1117/12.46369; https://doi.org/10.1117/12.46369
PROCEEDINGS
11 PAGES


SHARE
RELATED CONTENT

Novel materials for 157-nm bilayer resist designs
Proceedings of SPIE (June 11 2003)
Formation of hollow glass microcylinders of silica
Proceedings of SPIE (January 01 1998)
Lithographically directed materials assembly
Proceedings of SPIE (March 17 2009)

Back to Top