Metamorphosis of laser writer

Michael A.I. Wilson

doi:10.1117/12.29749

1 March 1991 Metamorphosis of laser writer

Michael A.I. Wilson

Proceedings Volume 1496, 10th Annual Symp on Microlithography; (1991) https://doi.org/10.1117/12.29749
Event: 10th Annual Symposium on Microlithography, 1990, Sunnyvale, CA, United States

Abstract

Micronic Laser Systems AB, a developer of laser pattern generator systems based in Sweden, and Align-Rite Limited, a maskmaker based in the United Kingdom, decided in early of 1989 to cooperate on a project intended to utilize Micronic's laser scanner systems and Align-Rite's maskmaking experience to develop a system tailored specifically for 5X reticle manufacture. However, it was also found that the initial design was reliant upon a high degree of engineering support and was not well suited to a production environment. Based on the experience of Align- Rite; modifications were introduced into a prototype system that was installed at Align-Rite, Bridgend for evaluation. Continuing work by Align-Rite and Micronic identified areas where further design and process modifications were required in order to qualify the system as a heavy duty production tool. These changes are incorporated int eh production version of the machine, Micronic LSR-18, that is now being built in Sweden. The presentation intends to give the audience an understanding of the principal features and operational characteristics of the laser pattern generator, to discuss the results achieved thus far, and the process that is being used to generate 5x reticles. Finally, the future path and expectation of the project will be given.

Citation Download Citation

Michael A.I. Wilson "Metamorphosis of laser writer", Proc. SPIE 1496, 10th Annual Symp on Microlithography, (1 March 1991); https://doi.org/10.1117/12.29749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available