Optical profilometry using spatial heterodyne interferometric methods

Gottfried Frankowski

doi:10.1117/12.46820

1 October 1991 Optical profilometry using spatial heterodyne interferometric methods

Gottfried Frankowski

Proceedings Volume 1500, Innovative Optics and Phase Conjugate Optics; (1991) https://doi.org/10.1117/12.46820
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Surface measurement technology's growing demand for fast and highly accurate data processing and representation results from the need to automate measuring processes and to raise quality control requirements in production. Measuring micro and macro profiles as well as surface roughness in production-related areas is a task that increasingly faces industrial production. Optical and particularly interferometrical methods of micro and macro surface investigation are especially favorable by virtue of their ability to measure without physical contact and therefore nondestructively and with high speed.

Citation Download Citation

Gottfried Frankowski "Optical profilometry using spatial heterodyne interferometric methods", Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, (1 October 1991); https://doi.org/10.1117/12.46820

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