Design considerations for high-power industrial excimer lasers

Heinz-Leonard Jetter

doi:10.1117/12.46914

1 September 1991 Design considerations for high-power industrial excimer lasers

Heinz-Leonard Jetter

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46914
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

The Siemens excimer laser is designed for industrial scale production processes. Its unique features are liquid dielectric capacitors, side-wise x-ray preionization, efficient cross flow gas circulation and an all metal/ceramic discharge head. All parts are integrated inside a hermetically sealed pressure vessel.

Citation Download Citation

Heinz-Leonard Jetter "Design considerations for high-power industrial excimer lasers", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46914

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