Excimer laser with sealed x-ray preionizer

Vladimir V. Atjezhev; Sergey R. Belov; Viacheslav S. Bukreev; Serge K. Vartapetov; Alexander N. Zhukov; Ilnur T. Ziganshin; Alexander M. Prokhorov; Alexey E. Soldatkin; Dmitrii Yu. Stepanov

doi:10.1117/12.46923

1 September 1991 Excimer laser with sealed x-ray preionizer

Vladimir V. Atjezhev, Sergey R. Belov, Viacheslav S. Bukreev, Serge K. Vartapetov, Alexander N. Zhukov, Ilnur T. Ziganshin, Alexander M. Prokhorov, Alexey E. Soldatkin, Dmitrii Yu. Stepanov

Author Affiliations +

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46923
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

An x-ray preionized excimer laser is described. For this laser, the special sealed metal- ceramic x-ray preionizer with cold cathode was constructed. The cathode was made from carbon felt and had 4 X 80 cm2 area. The discharge volume was 70 X 4 X 3 cm3 and on XeCl one provided the energy up to 2J in a pulse. In the same discharge chamber, the different types of preionizers (spark discharges, UV laser radiation) were investigated. It was shown that the output energy depends on the electron density uniformity rather than the electron concentration.

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Vladimir V. Atjezhev, Sergey R. Belov, Viacheslav S. Bukreev, Serge K. Vartapetov, Alexander N. Zhukov, Ilnur T. Ziganshin, Alexander M. Prokhorov, Alexey E. Soldatkin, and Dmitrii Yu. Stepanov "Excimer laser with sealed x-ray preionizer", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46923

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