Excitation of an excimer laser with microwave resonator

Lucia Huenermann; Rudolph Meyer; Franz Richter; Alexander Schnase

doi:10.1117/12.46924

1 September 1991 Excitation of an excimer laser with microwave resonator

Lucia Huenermann, Rudolph Meyer, Franz Richter, Alexander Schnase

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46924
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Excimer laser excitation with resonant microwave structures was obtained both for XeCl* and KrF. The discharge tube containing the laser gas is placed inside one or several coupled microwave resonators. Depending on the microwave structure, laser pulse energies up to the mJ range were achieved with XeCl.

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Lucia Huenermann, Rudolph Meyer, Franz Richter, and Alexander Schnase "Excitation of an excimer laser with microwave resonator", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46924

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