1 September 1991 In-situ growth of Y1Ba2Cu3O7-x thin films using XeCl excimer and Nd:YAG lasers
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Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46940
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands
Abstract
Thin films of Y1Ba2Cu3O7-x were deposited via pulsed laser ablation onto MgO and YSZ (Yttria-Stabilized Zirconia) substrates. The use of an IR Nd:YAG laser leads to nonstoichiometric deposition. The best quality superconducting films were deposited by means of UV excimer laser ablation ((lambda) equals 308 nm). These films were strongly orientated with c-axis perpendicular to (100) substrate. The film quality was found to be strongly dependent on substrate temperature, oxygen pressure, sample cooling rate and laser fluence. The deposition process was characterized by the time-resolved spectroscopic measurements of the emission from YO molecules.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mireille Gerri, Vladimir I. Marine, Yves Mathey, Marc L. Sentis, Philippe Ch. Delaporte, Bernard L. Fontaine, Bernard M. Forestier, "In-situ growth of Y1Ba2Cu3O7-x thin films using XeCl excimer and Nd:YAG lasers", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46940; https://doi.org/10.1117/12.46940
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