The construction and some characteristics of XeCl excimer lasers with active volumes of 0.4 cm3 and 1 cm3, and output energies of 50 (mu) J and 1.6 mJ, respectively, are described. In both cases, preionization by discharge on the ceramic surfaces of peaking capacitors is used in excitation schemes. In the case of the second laser, 'electric wind' is used in gas circulation which allows it to work with pulse rates up to 100 Hz.
Arnold A. Vill,
Ants A. Salk,
Irina K. Berik,
"Super small excimer laser", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46920; https://doi.org/10.1117/12.46920