1 September 1991 Super small excimer laser
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Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46920
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands
Abstract
The construction and some characteristics of XeCl excimer lasers with active volumes of 0.4 cm3 and 1 cm3, and output energies of 50 (mu) J and 1.6 mJ, respectively, are described. In both cases, preionization by discharge on the ceramic surfaces of peaking capacitors is used in excitation schemes. In the case of the second laser, 'electric wind' is used in gas circulation which allows it to work with pulse rates up to 100 Hz.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arnold A. Vill, Arnold A. Vill, Ants A. Salk, Ants A. Salk, Irina K. Berik, Irina K. Berik, } "Super small excimer laser", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46920; https://doi.org/10.1117/12.46920
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