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1 September 1991 Electron beam lithographic fabrication of computer-generated holograms
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Abstract
The fabrication of a range of computer-generated holographic optical elements by means of electron beam lithography is described. These elements can be considered as the combination of two overlapped cylindrical diffractive optical elements of the same focal length. The imaging properties of both orthogonal and non-orthogonal combinations are discussed. These elements produce sets of line foci at different distances and orientations determined by the angle between the two cylindrical elements. The detailed features of the line foci, 'macro- and micro-beading' can be related to the structure of the combined gratings. Equations identifying the locations of the foci are presented, and these suggest a distance measuring technique which might be applicable to machine vision.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew A. West and Robin W. Smith "Electron beam lithographic fabrication of computer-generated holograms", Proc. SPIE 1507, Holographic Optics III: Principles and Applications, (1 September 1991); https://doi.org/10.1117/12.47039
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