1 September 1991 Microwave characterization of high-Tc superconducting thin films for simulation and realization of planar microelectronic circuits
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Abstract
This paper shows the feasibility of the determination of the complex conductivity in the frequency range 18-26 GHz on YBaCuO superconducting films. The method used offers the advantage of being nondestructive and allows the reutilization of the sample for realizing microwave circuits. As an application, the authors realized with conventional photolithography resonators operating in the frequency range 1-18 GHz. Their resonance measurement at 78 K made it possible to infer the surface resistance and consequently to compare this value with the one deduced from the conductivity measurements.
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J. C. Carru, F. Mehri, D. Chauvel, Y. Crosnier, "Microwave characterization of high-Tc superconducting thin films for simulation and realization of planar microelectronic circuits", Proc. SPIE 1512, Infrared and Optoelectronic Materials and Devices, (1 September 1991); doi: 10.1117/12.47168; https://doi.org/10.1117/12.47168
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