1 December 1990 Submicron thin-film MOM-diodes for the detection of 10 μm infrared laser radiation
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Proceedings Volume 1514, 15th International Conference on Infrared and Millimeter Waves; 15143E (1990) https://doi.org/10.1117/12.2301532
Event: 15th International Conference on Infrared and Millimeter Waves, 1990, Orlando, FL, United States
Abstract
We manufacture thin-film Ni-NiO-Ni diodes for detection of 10 μm C02-laser radiation with the aid of electron and UV lithography as well as sputtering techniques. Minimum strip width is ≤ 0.35 μm, NiO thickness 50 Å and measured coupling factor ≥ 130.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Wilke, I. Wilke, } "Submicron thin-film MOM-diodes for the detection of 10 μm infrared laser radiation", Proc. SPIE 1514, 15th International Conference on Infrared and Millimeter Waves, 15143E (1 December 1990); doi: 10.1117/12.2301532; https://doi.org/10.1117/12.2301532
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