Three kinds of amorphous silicon x-ray sensors have been developed. The structures together with some basic characteristics of these sensors are reported. As an example of application, some operational tests for x-ray computed tomography (XCT) have been carried out. The results show that these sensors may provide a variety of potential applications in medical, scientific, and industrial fields.
"Amorphous silicon thin film x-ray sensor", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47313; https://doi.org/10.1117/12.47313