1 November 1991 Diamond-like carbon thin films prepared by rf-plasma CVD
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47311
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
The depositing process, growing rate, structure, and optical properties of Diamondlike Carbon (DLC) films have been studied. It's shown that in the DLC films approximating amorphous carbon and diamond coexist from TED and Raman spectra, and the IR absorption is very low in 2.5 - 14.0 micrometers wavelength range from IR spectrophotometer. The other properties of this films such as chemical, thermal stability, mechanical, and adhesion are discussed. Finally, efficient, durable antireflection and protective coatings on IR optics are described.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jie Jiang, Jie Jiang, Chen Zan Liu, Chen Zan Liu, } "Diamond-like carbon thin films prepared by rf-plasma CVD", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47311; https://doi.org/10.1117/12.47311
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