Finite element study on indentations into TiN- and multiple TiN/Ti- layers on steel

H. F. Wang; A. Wagendristel; X. Yang; P. Torzicky; H. Bangert

doi:10.1117/12.47308

1 November 1991 Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel

H. F. Wang, A. Wagendristel, X. Yang, P. Torzicky, H. Bangert

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47308
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

A state-of-the-art finite element program (MARC^TM) is used to derive as much information as possible from the simulation of a 136 degree(s) wedge indentation into multilayer systems. The deformed specimen is compared with experimentally found results as far as an experiment, i.e., a hardness indentation, yields measurable parameters. We suppose some of the surplus information obtained by the simulation to be reliable as well. A first step is undertaken toward the aim of obtaining elastic constants from a hardness or load-depth measurement in multi-phase films.

Citation Download Citation

H. F. Wang, A. Wagendristel, X. Yang, P. Torzicky, and H. Bangert "Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47308

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available