1 November 1991 Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47308
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
A state-of-the-art finite element program (MARCTM) is used to derive as much information as possible from the simulation of a 136 degree(s) wedge indentation into multilayer systems. The deformed specimen is compared with experimentally found results as far as an experiment, i.e., a hardness indentation, yields measurable parameters. We suppose some of the surplus information obtained by the simulation to be reliable as well. A first step is undertaken toward the aim of obtaining elastic constants from a hardness or load-depth measurement in multi-phase films.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. F. Wang, H. F. Wang, A. Wagendristel, A. Wagendristel, X. Yang, X. Yang, P. Torzicky, P. Torzicky, H. Bangert, H. Bangert, } "Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47308; https://doi.org/10.1117/12.47308
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