1 November 1991 Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47255
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xing-Rong Zhao, Xing-Rong Zhao, Jianhua Hao, Jianhua Hao, Fang Qiao Zhou, Fang Qiao Zhou, Han-Don Sun, Han-Don Sun, Lingjie Wang, Lingjie Wang, Xinjian Yi, Xinjian Yi, } "Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47255; https://doi.org/10.1117/12.47255
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