1 November 1991 Microstructure of titanium oxide thin films
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47278
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
Reported here are the TEM studies about the microstructures of TiO2 and Ti3O5 thin films thermally annealed at different temperatures and the microstructure change of TiO2 thin films before and after the laser-induced damage. Cross sectional TEM images of IAD deposited TiO2 singlelayer and TiO2/SiO2 multilayers are also observed and analyzed.
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Rui-Ying Fan, Yue Mei Lu, Xiangyun Song, "Microstructure of titanium oxide thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47278; https://doi.org/10.1117/12.47278
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