1 November 1991 Multicomponent electric-arc source of metallic plasma
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47293
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
Results of studies carried out during development of a metallic plasma multicomponent electric-arc source and containing eight independently operating cathodes are described. Structural scheme of the developed device and technical characteristics are represented.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dmitriy A. Karpov, Dmitriy A. Karpov, S. N. Nazikov, S. N. Nazikov, } "Multicomponent electric-arc source of metallic plasma", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47293; https://doi.org/10.1117/12.47293
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