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The development of ion sources for thin film coatings and modifications in the past decade are reviewed. Recent applications for optics and microelectronics are discussed.
David T. Wei andHarold R. Kaufman
"New ion-beam sources and their applications to thin film physics", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47248
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David T. Wei, Harold R. Kaufman, "New ion-beam sources and their applications to thin film physics," Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47248