1 November 1991 Optical properties of some ion-assisted deposited oxides
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47303
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
The refractive index of several high index oxide films obtained with ion assisted deposition (IAD) is studied as a function of some ion bombardment parameters. The oxygen/metal ratio of the films obtained with one material (Ta2O5) is also studied. All experiments have been performed on a commercially available large scale production machine.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Andreani, S. Luridiana, and Shuzheng Mao "Optical properties of some ion-assisted deposited oxides", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47303; https://doi.org/10.1117/12.47303
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