1 November 1991 Preparation of thin superconducting YBCO films by ion-beam mixing
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47209
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
In this paper, we present a new method using ion beam mixing to prepare thin superconducting YBCO films. In the high-low temperature target room, multilayered Y-Ba-Cu films were prepared by multi-evaporation. Then the multilayered films were mixed by ion beam. After annealing, superconducting films with zero resistance temperature at 80 K can be obtained. The constituent determined by electron probe microanalysis (EPMA) is close to the 1-2-3 case. X-ray diffraction patterns show that the structure of the film is orthorhombic having an obvious c-axis orientation perpendicular to the film surface like the epitaxial films.
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Xiang Jun Fan, You Gui Pen, Huai Xi Guo, Hong Tao Li, Chang Liu, Chang Zhong Jiang, Zhi Lin Pen, "Preparation of thin superconducting YBCO films by ion-beam mixing", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47209; https://doi.org/10.1117/12.47209
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