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1 November 1991 Research on influence of substrate to crystal growth by ion beams
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47250
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
The change of grain size and structure in several metal films on different substrate by Ar+ bombarding has been shown. The experimental results show that the size of film grain will become bigger and even form single crystal under special bombarding conditions. It is also found that some factors of substrate, such as lattice structure, lattice parameter, and deposited surface, etc., have a great influence upon its growth. A new mechanism of crystal growth has been investigated.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong Yin, Wen Xuan Guan, Shu Zi Sun, and Zhao An Zhang "Research on influence of substrate to crystal growth by ion beams", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47250
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