1 November 1991 Sensitivity and selectivity enhancement in semiconductor gas sensors
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47297
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
To date numerous efforts have been made to enhance the sensitivity and selectivity of semiconductor gas sensors to a specific gaseous component. Advantages of these modifications will be discussed in terms of the principle factors in physics and chemistry that are associated with the gas-sensing mechanism of semiconductor gas sensors.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Makoto Egashira, Makoto Egashira, Yasuhiro Shimizu, Yasuhiro Shimizu, } "Sensitivity and selectivity enhancement in semiconductor gas sensors", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47297; https://doi.org/10.1117/12.47297
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