1 November 1991 Sensitivity and selectivity enhancement in semiconductor gas sensors
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47297
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
To date numerous efforts have been made to enhance the sensitivity and selectivity of semiconductor gas sensors to a specific gaseous component. Advantages of these modifications will be discussed in terms of the principle factors in physics and chemistry that are associated with the gas-sensing mechanism of semiconductor gas sensors.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Makoto Egashira, Makoto Egashira, Yasuhiro Shimizu, Yasuhiro Shimizu, "Sensitivity and selectivity enhancement in semiconductor gas sensors", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47297; https://doi.org/10.1117/12.47297
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