Simulation of local layer-thickness deviation on multilayer diffraction

Y. P. Guo; X. C. He; S. V. Redko; Z. Q. Wu

doi:10.1117/12.47215

1 November 1991 Simulation of local layer-thickness deviation on multilayer diffraction

Y. P. Guo, X. C. He, S. V. Redko, Z. Q. Wu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47215
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Recent investigation on multilayer films with a local layer-thickness deviation has been performed. This kind of deviation may occur at any position in the multilayer. Simulated example of W/C, W/Si, and Pd/Si multilayers for CuK_(alpha) and CuL_(alpha) diffractions with different layer parameters as well as various amounts of the local deviations show quite different behaviors. The results show that the diffraction profile for a local deviation A' equals A+ (Delta) d or B' equals B+ (Delta) d is nearly antisymmetric to that for A' equals A- (Delta) d or B' equals B- (Delta) d and the appearance of double peaks is affected by both of the position and amount of the local deviation. Explanation has been carried out by the amplitude-phase diagrams.

Citation Download Citation

Y. P. Guo, X. C. He, S. V. Redko, and Z. Q. Wu "Simulation of local layer-thickness deviation on multilayer diffraction", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47215

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