1 November 1991 Structure and optical properties of a-C:H/a-SiOx:H multilayer thin films
Author Affiliations +
Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47274
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
Amorphous multilayer thin film a-C:H/a-Si:H was deposited by magnetron sputtering. X-ray diffraction and Auger electron spectroscopy measurements indicate very well the periodicity of the sample. The shift and broadening of the photoluminescence peak are interpreted in light of quantum size effect.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Ping Zhang, Wei Ping Zhang, Jing Bao Cui, Jing Bao Cui, Shan Xie, Shan Xie, Yi Zhou Song, Yi Zhou Song, Changsui Wang, Changsui Wang, Guien Zhou, Guien Zhou, Jian Xin Wu, Jian Xin Wu, "Structure and optical properties of a-C:H/a-SiOx:H multilayer thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47274; https://doi.org/10.1117/12.47274
PROCEEDINGS
3 PAGES


SHARE
Back to Top