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1 May 1991 Micromachined scanning mirrors for laser beam deflection
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Proceedings Volume 1522, Optical Space Communication II; (1991)
Event: Munich '91 (Lasers '91), 1991, Munich, Germany
The monolithic, micromachined devices presently discussed can be used in future satellite payloads to achieve low mass, low volume, and low power consumption requirements associated with pointing-acquisition-tracking purposes in optical free-space communications systems. Such performance parameters as resonance frequency and deflection characteristics can be adjusted through simple variation of the lithographic masks and their processing parameters. The technical feasibility of such monolithic scanners has been demonstrated.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Huber and U. Gerlach-Meyer "Micromachined scanning mirrors for laser beam deflection", Proc. SPIE 1522, Optical Space Communication II, (1 May 1991); doi: 10.1117/12.46089;

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