1 February 1992 Properties of spray pyrolysed SnO2:Sb films
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Proceedings Volume 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits; (1992) https://doi.org/10.1117/12.57036
Event: Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, 1992, Madras, India
Abstract
Transparent conducting thin films of tin oxide, doped with antimony were prepared by spray pyrolytic process under controlled conditions on borosilicate glass substrates, using pentahydrate tin chloride (SnCl4 .5H20) as the starting material. Variations in parameters such as, the substrate temperature T5 and post-deposition annealing temperature TA were studied. Electrical and optical properties and x-ray diffraction studies of these films were studied to characterize these films.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Arulgnanam, A. Arulgnanam, S. Balachandran, S. Balachandran, A. Balasubramanian, A. Balasubramanian, } "Properties of spray pyrolysed SnO2:Sb films", Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); doi: 10.1117/12.57036; https://doi.org/10.1117/12.57036
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