1 December 1991 Nd:YAG laser machining with multilevel resist kinoforms
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Abstract
Laser micromachining with ten level resist kinoforms, manufactured by electron-beam lithography, is presented. The kinoforms were shown to have a diffraction efficiency of 68%. One kinoform was used to drill nine diffraction-limited holes simultaneously in a 0.10 mm thick stainless-steel plate. Marking in a silicon wafer was also done.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mats Ekberg, Mats Ekberg, J. Michael Larsson, J. Michael Larsson, Aldo Bolle, Aldo Bolle, Sverker Hard, Sverker Hard, } "Nd:YAG laser machining with multilevel resist kinoforms", Proc. SPIE 1527, Current Developments in Optical Design and Optical Engineering, (1 December 1991); doi: 10.1117/12.48654; https://doi.org/10.1117/12.48654
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