1 December 1991 Surface roughness measurements of spherical components
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Abstract
In this paper, we deal with the laser measurement of surface roughness from spherical optical components (both convex and concave samples) by means of a self-made total integrated scattering apparatus and set out some experimental results. The radius of curvature of the spherical surface can be as much as 50 mm.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi-Sheng Chen and Wen-Gui Wang "Surface roughness measurements of spherical components", Proc. SPIE 1530, Optical Scatter: Applications, Measurement, and Theory, (1 December 1991); doi: 10.1117/12.50501; https://doi.org/10.1117/12.50501
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