1 January 1992 Birefringent common-path interferometer for testing large convex spherical surfaces
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Abstract
We have developed a new birefringent common-path interferometric method incorporating an automatic data processing system for testing large convex spherical surfaces. This interferometer can eliminate system errors and achieve accurate results of measurement. Precision is about (lambda) /50 and accuracy is about (lambda) /10.
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Xu Xiang Yang, Xu Xiang Yang, Caixin Xiang, Caixin Xiang, } "Birefringent common-path interferometer for testing large convex spherical surfaces", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134870; https://doi.org/10.1117/12.134870
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