1 January 1992 Development of the toroidal surface measuring system
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Abstract
We have developed a toroidal surface measuring interferometer system. One of the key features of our interferometer system is its ability to measure a toroidal surface without a toroidal wave front and a toroidal reference surface. Our optical system consists of a Fizeau interferometer using a spherical wave front. A cross section figure of the test surface is obtained to analyze interference fringes like a striped bar by using the Fourier transform method. We can then connect each cross section over the entire surface figure by rotation of a rotary table. Results of examination show that the accuracy of our measuring system is better than (lambda) /20 P-V.
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Hiroyuki Suhara, Hiroyuki Suhara, Nobuo Sakuma, Nobuo Sakuma, Seizoh Suzuki, Seizoh Suzuki, T. Ohsawa, T. Ohsawa, Shin Tsuyuzaki, Shin Tsuyuzaki, Satoru Toyooka, Satoru Toyooka, } "Development of the toroidal surface measuring system", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134849; https://doi.org/10.1117/12.134849
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