1 January 1992 Development of the toroidal surface measuring system
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We have developed a toroidal surface measuring interferometer system. One of the key features of our interferometer system is its ability to measure a toroidal surface without a toroidal wave front and a toroidal reference surface. Our optical system consists of a Fizeau interferometer using a spherical wave front. A cross section figure of the test surface is obtained to analyze interference fringes like a striped bar by using the Fourier transform method. We can then connect each cross section over the entire surface figure by rotation of a rotary table. Results of examination show that the accuracy of our measuring system is better than (lambda) /20 P-V.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroyuki Suhara, Hiroyuki Suhara, Nobuo Sakuma, Nobuo Sakuma, Seizoh Suzuki, Seizoh Suzuki, T. Ohsawa, T. Ohsawa, Shin Tsuyuzaki, Shin Tsuyuzaki, Satoru Toyooka, Satoru Toyooka, } "Development of the toroidal surface measuring system", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134849; https://doi.org/10.1117/12.134849

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