1 January 1992 High degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double-sided lapping
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Abstract
In this paper, we design a new double-sided lapping method that can accurately and efficiently lap extremely hard sapphire plates. We use a chemo-mechanical polishing method for the final polishing to get a scratch-free surface.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rang-Seng Chang, Rang-Seng Chang, Der-Chin Chen, Der-Chin Chen, "High degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double-sided lapping", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134869; https://doi.org/10.1117/12.134869
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