1 January 1992 Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine
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Abstract
This paper presents the technique of an on-machine precision profile measurement, through a kind of common-path interferometer using a zone-plate. We could analyze profile errors of a spherical mirror on the machine turning at a speed of 900 rpm. The results of experiments are evaluated.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazuo Yoshikawa, Kazuo Yoshikawa, Takashi Nomura, Takashi Nomura, Hatsuzo Tashiro, Hatsuzo Tashiro, Masane Suzuki, Masane Suzuki, Masao Usuki, Masao Usuki, Fumio Kobayashi, Fumio Kobayashi, } "Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); doi: 10.1117/12.134853; https://doi.org/10.1117/12.134853
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