1 December 1991 Diagnostics of a DC plasma torch
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Optical emission spectroscopy, Langmuir probes, and calorimetric techniques have been used to characterize the plasma jet in a DC plasma torch diamond deposition apparatus. The experimental data are compared to calculations based on a thermodynamic equilibrium model. The ion temperature obtained from the atomic hydrogen emission is within 10% of the calorimetrically deduced gas temperature, while the electron temperature is approximately a factor of two higher. For a wide range of process conditions, the plasma temperature is almost independent of the torch input power, but depends strongly on the hydrogen concentration in the feed gas. Calorimetry provides a means of measuring the concentration of atomic hydrogen produced by the torch.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Derrick A. Russell, Derrick A. Russell, Peter Taborek, Peter Taborek, } "Diagnostics of a DC plasma torch", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48276; https://doi.org/10.1117/12.48276

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