1 December 1991 Effects of interfacial modifications on diamond film adhesion
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Abstract
Microlithographic surface patterning has been investigated as a means of improving diamond film adhesion on noncompatible substrates. This technique produces significant improvements in film adhesion beyond identical unpatterned substrates, although sufficient film stresses can develop to induce subsurface substrate fracture. The substrate etching geometry can be chosen to simultaneously produce an antireflective surface relief.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey F. DeNatale, Jeffrey F. DeNatale, John F. Flintoff, John F. Flintoff, Alan B. Harker, Alan B. Harker, } "Effects of interfacial modifications on diamond film adhesion", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48278; https://doi.org/10.1117/12.48278
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