1 December 1991 Study of impurities in CVD diamond using cathodoluminescence
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Abstract
Nitrogen ions were implanted into diamond films formed by microwave plasma CVD. A color cathodoluminescence (CL) system were used to investigate the emission centers of as implanted and the subsequent annealed films. A zero-phono-line (ZPL) from the implanted N+ was observed at 3.19 eV. After annealing, a ZPL at 2.16 eV and a strong emission center in the violet region with a ZPL at 3.19 eV and phonon replicas were observed. The color CL images of the annealed films show that an orange-red color emission comes only from the {100} sectors because of the difference in crystal quality between the {100} and {111} sectors.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazuhito Nishimura, Jing Sheng Ma, Yoshihiro Yokota, Yusuke Mori, Hiroshi Kotsuka, Takashi Hirao, Makoto Kitabatake, Masahiro Deguchi, Kazuo Ogawa, Gang Ning, Hiroshi Tomimori, Akio Hiraki, "Study of impurities in CVD diamond using cathodoluminescence", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48294; https://doi.org/10.1117/12.48294
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