1 December 1991 Antireflection coatings of sputter-deposited SnOxFy and SnNxFy
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Abstract
Films of SnOxFy and SnNxFy were made by reactive rf magnetron sputtering at rates up to on the order of magnitude 50 nm/min. They have refractive indices of on the order of magnitude 1.7 and are useful for antireflecting metal-oxide-coated substrates. Spectral optical data, showing the antireflection property, are given for SnOx/SnOxFy and SnOx/SnNxFy tandem layers.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiqiang Yin, B. A. Stjerna, and Claes-Goeran Granqvist "Antireflection coatings of sputter-deposited SnOxFy and SnNxFy", Proc. SPIE 1536, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X, (1 December 1991); doi: 10.1117/12.49220; https://doi.org/10.1117/12.49220
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