Long-wavelength GexSi1-x/Si heterojunction infrared detectors and focal-plane arrays

Bor-Yeu Tsaur; Chenson K. Chen; Susanne A. Marino

doi:10.1117/12.48764

1 December 1991 Long-wavelength Ge_xSi_1-x/Si heterojunction infrared detectors and focal-plane arrays

Bor-Yeu Tsaur, Chenson K. Chen, Susanne A. Marino

Proceedings Volume 1540, Infrared Technology XVII; (1991) https://doi.org/10.1117/12.48764
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Heterojunction GexSi1-x/Si internal-photoemission infrared detectors exhibiting nearly ideal thermionic-emission dark-current characteristics have been fabricated with cutoff wavelengths out to 25 micrometers . Heteroepitaxial p-GexSi1-x layers, degenerately doped with boron to concentrations exceeding 1020 cm-3 in order to obtain high free-carrier absorption, are grown in Si substrates by molecular beam epitaxy. The detector cutoff wavelength, which is determined to first order by the valence- band offset, is tailored by varying the composition of the GexSi1-x layer and can be fine tuned by adjusting such parameters as the doping concentration and growth temperature. High-quality imaging without uniformity correction has been demonstrated in the long-wavelength infrared spectral band for 400 X 400- and 320 X 244-element focal plane arrays consisting of GexSi1-x/Si detectors, which have cutoff wavelengths of 9.3 and 10.5 micrometers , respectively, and monolithic CCD readout circuitry.

Citation Download Citation

Bor-Yeu Tsaur, Chenson K. Chen, and Susanne A. Marino "Long-wavelength Ge_xSi_1-x/Si heterojunction infrared detectors and focal-plane arrays", Proc. SPIE 1540, Infrared Technology XVII, (1 December 1991); https://doi.org/10.1117/12.48764

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available