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1 December 1991 Fiber-coupled heterodyne interferometric displacement sensor
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Abstract
Space-based interferometers and large segmented reflectors will require precision metrology with nanometer accuracy for active control systems. This paper summarizes an experimental study of an optical heterodyne interferometer with resolution of about 3 nm. Optical signals are carried to and from the interferometer by optical fibers to avoid thermally loading the reflector panels. Heterodyne detection provides far greater precision than does traditional interferometry.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Noble M. Nerheim "Fiber-coupled heterodyne interferometric displacement sensor", Proc. SPIE 1542, Active and Adaptive Optical Systems, (1 December 1991); https://doi.org/10.1117/12.48835
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